Microelectronics production equipment
Noise and vibration test and measurement solutions for laboratory, in the field and test cells
Reticle stage, encoder servo acceleration & speed tuning, wafer stage, stability (grid, process), acceleration & speed control, floor vibrations, µelectronics workshop factories, medical scanners
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Reticle stage
Encoder servo acceleration & speed tuning
- Multi-channel portable instrument
- Swept sine servo analysis characterization
- High dynamic/high sensitivity
Wafer stage
Stability (grid, process), acceleration & speed control
- Multi-channels portable instrument
- Integrated EMA, OMA software (modal solution)
- High dynamic/high sensitivity
- Forced/natural excitation
Floor vibration
µelectronics workshop factories, medical scanners
- Portable & autonomous instruments
- High sensitivity inputs
- Displacement/velocity from accelerometers
- Real-time 1/3rd octave results
- Overlaid limits & live results
Recommended packages
Floor vibration analyzer
- OR36 16 ch. portable Teamwork instrument
- Real-time 1/N octave CPB analysis software module
- Real-time single/double integration filters
Stepper structural dynamics and servo
- OR38 32 ch. dynamic signal analyzer
- FFT narrow band spectral analysis software module
- XFT narrow band frequency response function software module
- Advanced swept sine generator for servo analysis tests
OROS advantages
Microelectronic machines
- Multi-channels instruments
- High sensitivity & accuracy inputs
- Servo analysis